Process water is widely used in microelectronics, food and beverage, fine chemical and atomic energy industries,especial in in microelectronic technology and semiconductor integrated circuit industry. Pure water has various test items ,for example: electrics resistivity test,TOC,particle test, Sio2 test and colonial test. Ultrapure water become more and more important in microelectronic industry.
① Pre-RO Filtration
Function: are typically used to protect membrane systems from premature fouling and short life and
reduce system cost. 5um/10um is commonly used.
Item |
Flow Rate |
Part Number |
Option A |
≥100m³/h |
HF150, BG160 |
Option B |
<100m³/h |
GUF |
② Resin Fine Filtration
Function: Installed after ions or resin exchange,trap resin fine, avoid of secondary pollution.
Cobetter prodcuts have high filtration efficiency, no ions dissolution, provide high quality water.
Item |
Description |
Part Number |
Option A |
Particle control strictly |
APS 0.65/0.45um |
Option B |
Economical |
EPP 3um |
③ Final Sterile Filtration
Function: Installed on final Filter housing, to remove particles and organisms and protect water quality.
0.22um APSmembrane filter cartridge is commonly used, but if you have strict requirement of particle control,
you can choose APS 0.1um or 0.05um.
■ APS filter cartridge
④ Vent Filtration
Function: Application is for sterilize the air or gas. Inside housing gas is separated from outside,
and go through the housing to outside. So the outside organisms and particles can not go inside.
0.01um Hydrophobic PTFE filter is commonly used.
■ GPF filter cartridge